Thermally insulated phase change material memory cells with pillar structure

专利类型: 
相变材料专利导航
公开(公告)号: 
US8138056B2
申请日: 
2009-07-03
申请局: 
US
摘要: 
A memory cell structure and method for forming the same. The method includes forming a pore within a dielectric layer. The pore is formed over the center of an electrically conducting bottom electrode. The method includes depositing a thermally insulating layer along at least one sidewall of the pore. The thermally insulating layer isolates heat from phase change current to the volume of the pore. In one embodiment phase change material is deposited within the pore and the volume of the thermally insulating layer. In another embodiment a pore electrode is formed within the pore and the volume of the thermally insulating layer, with the phase change material being deposited above the pore electrode. The method also includes forming an electrically conducting top electrode above the phase change material.
原始专利权人: 
IBM
受让人: 
INTERNATIONAL BUSINESS MACHINES CORPORATION | GLOBALFOUNDRIES U.S. 2 LLC | GLOBALFOUNDRIES INC. | WILMINGTON TRUST, NATIONAL ASSOCIATION | GLOBALFOUNDRIES U.S. INC.
当前专利权人: 
GlobalFoundries US Inc